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ISSN Approved Journal || eISSN: 2582-8185 || CODEN: IJSRO2 || Impact Factor 8.2 || Google Scholar and CrossRef Indexed

Peer Reviewed and Referred Journal || Free Certificate of Publication

Research and review articles are invited for publication in March 2026 (Volume 18, Issue 3) Submit manuscript

AI-driven process control for micro/nano-fabrication of sustainable devices: Technologies, challenges, and future directions

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  • AI-driven process control for micro/nano-fabrication of sustainable devices: Technologies, challenges, and future directions

Md Fazly Rabbi Ahad *, Jakiya Sultana, Md. Ariful Islam and Md. Habibur Rahman Nayeem

Department of Apparel Manufacturing Management and Technology, Shanto Mariam University of Creative Technology.

Research Article

International Journal of Science and Research Archive, 2026, 18(03), 911-923

Article DOI: 10.30574/ijsra.2026.18.3.0555

DOI url: https://doi.org/10.30574/ijsra.2026.18.3.0555

Received on 07 February 2026; revised on 14 March 2026; accepted on 16 March 2026

This paper explores the integration of AI-driven process control in micro- and nano-fabrication to advance the development of sustainable devices. It highlights the critical role of AI technologies in optimizing fabrication processes, enhancing precision, and reducing waste, thereby addressing key challenges in scalability and environmental impact. The study also examines current technological barriers and proposes future directions for leveraging AI to enable smarter, more efficient manufacturing paradigms in the sustainable device landscape. These insights aim to accelerate innovation and promote eco-friendly production methods in the evolving micro/nano-fabrication domain.

AI-Driven Process Control; Micro/Nano-Fabrication; Sustainable Device Manufacturing; Precision Optimization; Eco-Friendly Production

https://ijsra.net/sites/default/files/fulltext_pdf/IJSRA-2026-0555.pdf

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Md Fazly Rabbi Ahad, Jakiya Sultana, Md. Ariful Islam and Md. Habibur Rahman Nayeem. AI-driven process control for micro/nano-fabrication of sustainable devices: Technologies, challenges, and future directions. International Journal of Science and Research Archive, 2026, 18(03), 911-923. Article DOI: https://doi.org/10.30574/ijsra.2026.18.3.0555.

Copyright © Author(s). All rights reserved. This article is published under the terms of the Creative Commons Attribution 4.0 International License (CC BY 4.0), which permits use, sharing, adaptation, distribution, and reproduction in any medium or format, as long as appropriate credit is given to the original author(s) and source, a link to the license is provided, and any changes made are indicated.

All statements, opinions, and data contained in this publication are solely those of the individual author(s) and contributor(s). The journal, editors, reviewers, and publisher disclaim any responsibility or liability for the content, including accuracy, completeness, or any consequences arising from its use.

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